2028 Series
Ultra-High Purity
Vacuum Generators                                              
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2028 Series Ultra-High Purity Vacuum Generators

This stainless steel Vacuum Generator Series is nitrogen operated and is available with single or dual vacuum ports. Applications for this generator include:

  • Primary vacuum generation in gas cabinets
  • Chamber evacuation for semiconductor manufacture
  • Dilution of vented gases

2028 Series - Technical Data

2028 SERIES - Technical Data