R4i
Laterals
Ultra-High Purity
Prefab Laterals with Integrated
Diaphragm Valves
Carten's
ready-for-integration R4i-Laterals are designed to meet all UHP specifications
for the semiconductor industry. Prefab laterals are fabricated using a
pulled-tee method, then welded, tested, and packaged in a Class 10 cleanroom
environment in a partnership with Dockweiler.
- High-purity gas system
lateral with integrated industry-approved SPDS
diaphragm valves
-
Integrated lengths up to 24' mean fewer welds, reduced time to UHP
qualification
-
Main tube
sizes to 6" Ø, valve branches to 1" Ø
-
Both manual
and air-actuated valves available
-
All R4i
laterals are 100 % Helium leak tested
(1x10-9
scc/sec) -
Fast
delivery due to worldwide manufacturing
-
3D CAD data
for BIM modeling available
- Full
UHP certification package provided
R4i
Series - Additional Information
SPDS Series - Technical Data
For
technical data on the valves used in R4i Laterals, see our
SPDS diaphram valves page.
|